1. Measurement technology for micro-nanometer devices /
Author: Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
Library: Center and Library of Islamic Studies in European Languages (Qom)
Subject: Microelectromechanical systems-- Testing.,Microtechnology-- Measurement.,Nanotechnology-- Measurement.,Physical measurements.
Classification :
TA418
.
9
.
N35
